Penggunaan SEM dan Image-J dalam Mempelajari Ketebalan Lapisan Mikrostruktur
Abstract
Telah dilakukan penelitian terkait dengan ketebalan lapisan mikrostruktur dengan menggunakan SEM (Scanning Electron Microscope) dan Image-J. Sampel diuji dengan menggunakan SEM untuk mendapatkan mikrostruktur dari sampel. Setelah mikrostruktur didapatkan maka dilakukan analisa ketebalan lapisan mikrostruktur dengan menggunakan teknik pengukuran secara langsung menggunakan SEM dan teknik pengukuran tidak langsung menggunakan aplikasi Image-J. Berdasarkan hasil penelitian yang telah dilakukan, pengukuran ketebalan lapisan dengan menggunakan SEM dan Image-J menunjukkan pola kurva yang sama untuk semua ketebalan lapisan. Persentase perbedaan pengukuran ketebalan lapisan dengan menggunakan SEM dan Image J adalah 0.7% untuk lapisan ke-1, 1,6 % untuk lapisan ke-2 dan 0.8 % untuk lapisan ke-3. Persentase perbedaan tersebut sangat kecil (<2%) sehingga aplikasi Image-J ini dapat digunakan sebagai alternatif di dalam pengukuran ketebalan lapisan mikrostruktur
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